Formation of cubic boron nitride films by boron evaporation and nitrogen ion beam bombardment.
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چکیده
منابع مشابه
Growth of adhesive cubic phase boron nitride films without argon ion bombardment
Previously, in situ bombardment of massive ions (Ar, Kr, etc.) was considered to be necessary for the formation of c-BN films. Because of the accumulated stress, bombardment of massive ions has led to the formation of c-BN films with poor adhesion. Here we show that c-BN films can be grown without involving bombardment of massive ions. This is achieved by using plasma-assisted pulsed-laser depo...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1987
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.53.1540